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Recent EGS-WW projects include:
Anhydrous Hydrogen Chloride Purification and Filling System
Nitrous Oxide and Water Adsorption System for NF3 Production Facility
Automated Semiconductor Grade Cylinder, Ton and Iso Container Filling Systems for NF3
Semiconductor Grade Ammonia Distillation Systems
Automated Semiconductor Grade Cylinder and Ton Container Filling Systems for Ammonia
250 TPA Semiconductor Grade NF3 Distillation Systems
Automated analysis systems
CO2 Plant Controls Upgrade
These projects are located in South Africa, Taiwan, and the USA.
©2003 Engineered Gas Systems Worldwide, Inc. info@enggas.com 141 Aspen Lane, Gilbertsville, PA 19525 Tel: 610-367-2340 Fax: 610-367-2324