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EGS-WW
Process engineers have experience in numerous specialty gas applications,
and have undertaken projects that require innovative approaches to
potentially lethal or flammable gases.
Specialty
gas on-site generation, purification, storage, handling, compression, and
distribution.
Whatever
your need, EGS-WW provides consulting,
design and fabrication.
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EGS-WW
is currently designing an Anhydrous Hydrogen
Chloride (AHCl) purification and cylinder filling system for a
international client. In
this process a variety of contaminants are removed from a crude feed
stream of 97.8% AHCl to produce a liquid phase 5.0 Grade (99.999%) product
AHCl.
The contaminants are removed via adsorption and distillation
techniques and the final product is sent to a liquid storage tank.
Product from storage is then transferred into cylinders following
cylinder preparation via a semi-automated filling process.
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EGS-WW
engineered, designed and constructed the following components for Formosa
Plastic Corporation Semiconductor-grade Nitrogen
Trifluoride (NF3) Plant.
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N2O
& H2O Adsorption System |
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Bulk
Storage Tank (2 - 5000 liter cryogenic storage tanks) |
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Automatic
Cylinder Filling Facility |

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EGS-WW
engineered, designed and constructed the following components for a 250
Ton per year Semiconductor-grade Nitrogen
Trifluoride Plant.
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NF3
Distillation Columns and Coldbox |
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Day
Storage Tanks (3-650 liter cryogenic storage tanks) |
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Bulk
Storage Tank (1-8.5m3 cryogenic storage tank) |
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Semi-Automatic
Cylinder/Ton/Iso Container Filling Facility |
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N2O,
CO2 Adsorption System |

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EGS-WW, in conjunction with BOC
Edwards and BOC Lienhwa, engineered, designed and constructed the
following components for a Semiconductor grade Ammonia
(NH3) Plant in Taiwan.
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75
Kg/hr Ammonia Purification Skid including Adsorbers and Distillation
Column |
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600
gallon Ammonia Storage Tank |
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Automated
Cylinder and Container Filling System |
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Fully
Automated Analysis System |

EGS
has direct experience with the following specialty gases:
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Ultra-high purity gases,
including oxygen, nitrogen, argon, and hydrogen |
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Ultra-high purity and
supercritical carbon dioxide |
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Semi-conductor grade gases
such as halides, SF6, NF3, NH3, HCl
and Fluorine |
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High purity anhydrous
ammonia and hydrogen chloride |
Engineered Gas
Systems Worldwide can meet your process, structural, electrical, CAD, and
project needs in a turnkey fashion. Our systems are tailored to your
application, and are engineered to meet all safety and material compliance
regulations.
Let us apply our wide range of
technologies to your particular gas requirement.
We
will design and build the plant to your specifications, or develop our own
specifications to meet your specialty gas requirement.
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