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Specialty Gases

Home Adsorber Model NF3  Gas Cabinet NF3 Distillation NH3 Purification NH3 Distillation NH3 Filling NH3 Analysis

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Specialty Gases
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EGS-WW Process engineers have experience in numerous specialty gas applications, and have undertaken projects that require innovative approaches to potentially lethal or flammable gases.

Specialty gas on-site generation, purification, storage, handling, compression, and distribution.

Whatever your need, EGS-WW provides consulting, design and fabrication.

EGS-WW is currently designing an Anhydrous Hydrogen Chloride (AHCl) purification and cylinder filling system for a international client. In this process a variety of contaminants are removed from a crude feed stream of 97.8% AHCl to produce a liquid phase 5.0 Grade (99.999%) product AHCl.  The contaminants are removed via adsorption and distillation techniques and the final product is sent to a liquid storage tank.  Product from storage is then transferred into cylinders following cylinder preparation via a semi-automated filling process. 

EGS-WW engineered, designed and constructed the following components for Formosa Plastic Corporation Semiconductor-grade Nitrogen Trifluoride (NF3) Plant.

N2O & H2O Adsorption System

Bulk Storage Tank (2 - 5000 liter cryogenic storage tanks)

Automatic Cylinder Filling Facility

NO2 & H2O Adsorber       Cylinder Fill Gas Cabinet

EGS-WW engineered, designed and constructed the following components for a 250 Ton per year Semiconductor-grade Nitrogen Trifluoride Plant.

NF3 Distillation Columns and Coldbox

Day Storage Tanks (3-650 liter cryogenic storage tanks)

Bulk Storage Tank (1-8.5m3 cryogenic storage tank)

Semi-Automatic Cylinder/Ton/Iso Container Filling Facility

N2O, CO2 Adsorption System 

NF3 Cold Box

EGS-WW, in conjunction with BOC Edwards and BOC Lienhwa, engineered, designed and constructed the following components for a Semiconductor grade Ammonia (NH3) Plant in Taiwan.

 

75 Kg/hr Ammonia Purification Skid including Adsorbers and Distillation Column

600 gallon Ammonia Storage Tank 

Automated Cylinder and Container Filling System

Fully Automated Analysis System

 NH3 Column  Semiconductor Grade NH3 Filling Skid

EGS has direct experience with the following specialty gases:

Ultra-high purity gases, including oxygen, nitrogen, argon, and hydrogen

Ultra-high purity and supercritical carbon dioxide

Semi-conductor grade gases such as halides, SF6, NF3, NH3, HCl and Fluorine

High purity anhydrous ammonia and hydrogen chloride

Engineered Gas Systems Worldwide can meet your process, structural, electrical, CAD, and project needs in a turnkey fashion. Our systems are tailored to your application, and are engineered to meet all safety and material compliance regulations.

Let us apply our wide range of technologies to your particular gas requirement.

We will design and build the plant to your specifications, or develop our own specifications to meet your specialty gas requirement.

 

©2003 Engineered Gas Systems Worldwide, Inc.
info@enggas.com
141 Aspen Lane, Gilbertsville, PA 19525
Tel: 610-367-2340 Fax: 610-367-2324