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![Adsorber 3D Model]()
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N2O & H2O
Adsorption System Model |
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In
this process, water and N2O are removed in separate vessels.
The water removal vessels are fabricated out of stainless steel,
while the N2O vessels are Inconel along with Inconel valves and
piping to withstand the potential decomposition of NF3 into
Fluorine during regeneration. The system design flow rate is 20 Nm3/hr. |
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