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NF3 Cylinder Fill Gas Cabinet |
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click above picture for gas cabinet slide
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This
gas cabinet is for designed to fill 10 cylinders simultaneously with
semiconductor grade NF3. The system is fully automatic, once
the cylinders are placed in the cabinet and connected, they go through
several purge and vacuum cycles. NF3 is then admitted and upon
achieving the proper weight the fill cycle ends. The cylinder valves are
shut and the filling system is vented to a recycle header. The filling
system the goes through several purge and vacuum cycles. The purge remains
on during connection and disconnection of the cylinders to ensure no
contaminants are introduced. All piping is electropolished.
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